Manufacturing method of light-emitting device

Details Manufacturing method of light-emitting device Manufacturing method of light-emitting device

Filed on

2011-05-17

Date issued

2011-05-17

Examiner

Fulk, Steven J (Department: 2891)

Patent Class

Semiconductor device manufacturing: process

SubClass

Making field effect device having pair of active regions...

SubSubClass

On insulating substrate or layer

Other Related Categories

C257SE21411

Type

Reexamination Certificate

Status

active

Patent number

07943443

Description

ABSTRACT:
The present invention provides a vapor deposition method and a vapor deposition system of film formation systems by which EL materials can be used more efficiently and EL materials having superior uniformity with high throughput rate are formed. According to the present invention, inside a film formation chamber, an evaporation source holder in a rectangular shape in which a plurality of containers sealing evaporation material is moved at a certain pitch to a substrate and the evaporation material is vapor deposited on the substrate. Further, a longitudinal direction of an evaporation source holder in a rectangular shape may be oblique to one side of a substrate, while the evaporation source holder is being moved. Furthermore, it is preferable that a movement direction of an evaporation source holder during vapor deposition be different from a scanning direction of a laser beam while a TFT is formed.

REFERENCES:
patent: 2351536 (1944-06-01), Osterberg et al.
patent: 2435997 (1948-02-01), Bennett
patent: 3312190 (1967-04-01), Bradshaw
patent: 3543717 (1970-12-01), Adachi
patent: 3636305 (1972-01-01), Passmore
patent: 3756193 (1973-09-01), Carmichael et al.
patent: 3931490 (1976-01-01), Grothe et al.
patent: 3931789 (1976-01-01), Kakei et al.
patent: 3971334 (1976-07-01), Pundsack
patent: 4023523 (1977-05-01), Ing
patent: 4187801 (1980-02-01), Monk
patent: 4225805 (1980-09-01), Smithgall et al.
patent: 4233937 (1980-11-01), Steube
patent: 4405487 (1983-09-01), Harrah et al.
patent: 4446357 (1984-05-01), Barshter
patent: 4543467 (1985-09-01), Eisele et al.
patent: 4592306 (1986-06-01), Gallego
patent: 4602192 (1986-07-01), Nomura et al.
patent: 4627989 (1986-12-01), Feuerstein et al.
patent: 4672265 (1987-06-01), Eguchi et al.
patent: 4769292 (1988-09-01), Tang et al.
patent: 4885211 (1989-12-01), Tang et al.
patent: 4897290 (1990-01-01), Terasaka et al.
patent: 4951601 (1990-08-01), Maydan et al.
patent: 5190590 (1993-03-01), Suzuki et al.
patent: 5258325 (1993-11-01), Spitzer et al.
patent: 5259881 (1993-11-01), Edwards et al.
patent: 5310410 (1994-05-01), Begin et al.
patent: 5429884 (1995-07-01), Namiki et al.
patent: 5512320 (1996-04-01), Turner et al.
patent: 5534314 (1996-07-01), Wadley et al.
patent: 5550066 (1996-08-01), Tang et al.
patent: 5643685 (1997-07-01), Torikoshi
patent: 5670792 (1997-09-01), Utsugi et al.
patent: 5701055 (1997-12-01), Nagayama et al.
patent: 5817366 (1998-10-01), Arai et al.
patent: 5844363 (1998-12-01), Gu et al.
patent: 5902688 (1999-05-01), Antoniadis et al.
patent: 5904961 (1999-05-01), Tang et al.
patent: 5906857 (1999-05-01), McKee et al.
patent: 5921836 (1999-07-01), Nanto et al.
patent: 5935395 (1999-08-01), Ouellet et al.
patent: 5943600 (1999-08-01), Ngan et al.
patent: 5945967 (1999-08-01), Rallison et al.
patent: 5972183 (1999-10-01), Krueger et al.
patent: 6001413 (1999-12-01), Matsuura et al.
patent: 6011904 (2000-01-01), Mattord
patent: 6023308 (2000-02-01), Takemura
patent: 6049167 (2000-04-01), Onitsuka et al.
patent: 6124215 (2000-09-01), Zheng
patent: 6132280 (2000-10-01), Tanabe et al.
patent: 6132805 (2000-10-01), Moslehi
patent: 6149392 (2000-11-01), Conte
patent: 6179923 (2001-01-01), Yamamoto et al.
patent: 6237529 (2001-05-01), Spahn
patent: 6244212 (2001-06-01), Takacs et al.
patent: 6246387 (2001-06-01), Yamazaki
patent: 6280861 (2001-08-01), Hosokawa et al.
patent: 6294892 (2001-09-01), Utsugi et al.
patent: 6296894 (2001-10-01), Tanabe et al.
patent: 6299746 (2001-10-01), Conte et al.
patent: 6319321 (2001-11-01), Hiraga et al.
patent: 6326726 (2001-12-01), Mizutani et al.
patent: 6333065 (2001-12-01), Arai et al.
patent: 6337105 (2002-01-01), Kunieda et al.
patent: 6340501 (2002-01-01), Kamiyama et al.
patent: 6380081 (2002-04-01), Lee
patent: 6403392 (2002-06-01), Burrows et al.
patent: 6429100 (2002-08-01), Yoneda
patent: 6432561 (2002-08-01), Yamazaki
patent: 6469439 (2002-10-01), Himeshima et al.
patent: 6482752 (2002-11-01), Yamazaki et al.
patent: 6482852 (2002-11-01), Shakespeare et al.
patent: 6495198 (2002-12-01), Peng
patent: 6496171 (2002-12-01), Yamazaki
patent: 6528108 (2003-03-01), Kawamura
patent: 6537607 (2003-03-01), Swanson
patent: 6592933 (2003-07-01), Himeshima et al.
patent: 6633121 (2003-10-01), Eida et al.
patent: 6641674 (2003-11-01), Peng
patent: 6649210 (2003-11-01), Tokailin et al.
patent: 6660332 (2003-12-01), Kawase et al.
patent: 6660409 (2003-12-01), Komatsu et al.
patent: 6696096 (2004-02-01), Tsubaki et al.
patent: 6776847 (2004-08-01), Yamazaki et al.
patent: 6776880 (2004-08-01), Yamazaki
patent: 6827622 (2004-12-01), Yamada et al.
patent: 6830626 (2004-12-01), Smith
patent: 6893709 (2005-05-01), Kitazume
patent: 2001/0006827 (2001-07-01), Yamazaki et al.
patent: 2001/0009154 (2001-07-01), Nguyen et al.
patent: 2001/0022272 (2001-09-01), Plester et al.
patent: 2001/0024185 (2001-09-01), Yamazaki
patent: 2001/0038367 (2001-11-01), Inukai
patent: 2002/0001888 (2002-01-01), Yoneda
patent: 2002/0009538 (2002-01-01), Arai
patent: 2002/0011205 (2002-01-01), Yamazaki et al.
patent: 2002/0030443 (2002-03-01), Konuma et al.
patent: 2002/0067400 (2002-06-01), Kawase et al.
patent: 2002/0076847 (2002-06-01), Yamada et al.
patent: 2002/0081372 (2002-06-01), Peng
patent: 2002/0084032 (2002-07-01), Jeng et al.
patent: 2002/0155632 (2002-10-01), Yamazaki et al.
patent: 2002/0179013 (2002-12-01), Kido et al.
patent: 2002/0187265 (2002-12-01), Mori et al.
patent: 2002/0192499 (2002-12-01), Tokailin et al.
patent: 2002/0197418 (2002-12-01), Mizukami et al.
patent: 2002/0197760 (2002-12-01), Yamazaki et al.
patent: 2003/0015140 (2003-01-01), Van Slyke et al.
patent: 2003/0017259 (2003-01-01), Yamada et al.
patent: 2003/0024479 (2003-02-01), Kashiwaya et al.
patent: 2003/0101937 (2003-06-01), Van Slyke et al.
patent: 2003/0124764 (2003-07-01), Yamazaki et al.
patent: 2003/0162314 (2003-08-01), Yamazaki et al.
patent: 2003/0180457 (2003-09-01), Murakami et al.
patent: 2003/0194484 (2003-10-01), Yamazaki et al.
patent: 2003/0219530 (2003-11-01), Yamazaki et al.
patent: 2003/0221620 (2003-12-01), Yamazaki
patent: 2004/0031442 (2004-02-01), Yamazaki et al.
patent: 2004/0035360 (2004-02-01), Yamazaki et al.
patent: 2004/0035366 (2004-02-01), Keum et al.
patent: 2004/0040504 (2004-03-01), Yamazaki et al.
patent: 2004/0061118 (2004-04-01), Yamazaki et al.
patent: 2004/0096694 (2004-05-01), Tokailin et al.
patent: 2004/0139914 (2004-07-01), Yamazaki et al.
patent: 2004/0139984 (2004-07-01), Yamazaki et al.
patent: 2005/0005850 (2005-01-01), Yamazaki
patent: 2005/0106322 (2005-05-01), Yamazaki et al.
patent: 28 34 806 (1980-02-01), None
patent: 44 22 697 (1996-01-01), None
patent: 0 810 639 (1997-12-01), None
patent: 0 865 229 (1998-09-01), None
patent: 0 955 791 (1999-11-01), None
patent: 1 113 087 (2001-07-01), None
patent: 1 207 557 (2002-05-01), None
patent: 1 254 969 (2002-11-01), None
patent: 54-127877 (1979-10-01), None
patent: 57-123973 (1982-08-01), None
patent: 58-177463 (1983-10-01), None
patent: 60-32361 (1985-03-01), None
patent: 60-121616 (1985-06-01), None
patent: 63-79959 (1988-04-01), None
patent: 63-81323 (1988-04-01), None
patent: 63-186763 (1988-11-01), None
patent: 63-313123 (1988-12-01), None
patent: 64-42392 (1989-02-01), None
patent: 2-173261 (1990-07-01), None
patent: 4-116169 (1992-04-01), None
patent: 5-304197 (1993-11-01), None
patent: 6-88233 (1994-03-01), None
patent: 6-235061 (1994-08-01), None
patent: 6-299353 (1994-10-01), None
patent: 6-306181 (1994-11-01), None
patent: 7-192866 (1995-07-01), None
patent: 7-252671 (1995-10-01), None
patent: 8-111285 (1996-04-01), None
patent: 9-16960 (1997-01-01), None
patent: 9-209127 (1997-08-01), None
patent: 9-256142 (1997-09-01), None
patent: 9-321310 (1997-12-01), None
patent: 10-41069 (1998-02-01), None
patent: 10-168559 (1998-06-01), None
patent: 10-195639 (1998-07-01), None
patent: 10-214682 (1998-08-01), None
patent: 10-255973 (1998-09-01), None
patent: 10-335062 (1998-12-01), None
patent: 11-214700 (1999-08-01), None
patent: 11-229123 (1999-08-01), None
patent: 2000-150150 (2000-05-01), None
patent: 2000-164353 (2000-06-01), None

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