Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2011-08-02
2011-08-02
Vanore, David A (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S3960ML, C250S397000, C250S398000, C250S492220, C250S491100, C341S120000, C341S141000
Reexamination Certificate
active
07989777
ABSTRACT:
A method for inspecting a settling time of a deflection amplifier includes setting a settling time, performing shooting a plurality of times alternately to project two patterns of different types which are shaped by making a charged particle beam pass through a first and a second apertures while deflecting the charged particle beam by a deflector controlled by an output of a deflection amplifier which is driven based on the settling time having been set, measuring beam currents of the shooting, calculating an integral current of the beam currents measured, and calculating a difference between the integral current calculated and a reference integral current to output the difference.
REFERENCES:
patent: 3984827 (1976-10-01), Hickin et al.
patent: 4954757 (1990-09-01), Berwin
patent: 5345085 (1994-09-01), Prior
patent: 5404018 (1995-04-01), Yasuda et al.
patent: 5530250 (1996-06-01), Yamashita
patent: 5719402 (1998-02-01), Satoh et al.
patent: 5721432 (1998-02-01), Satoh et al.
patent: 7068202 (2006-06-01), Waltari
patent: 7088275 (2006-08-01), Waltari
patent: 7417233 (2008-08-01), Stovall et al.
patent: 7463173 (2008-12-01), Sanmiya et al.
patent: 7589335 (2009-09-01), Matsukawa et al.
patent: 7601968 (2009-10-01), Abe et al.
patent: 7741614 (2010-06-01), Inoue
patent: 7834333 (2010-11-01), Nishimura et al.
patent: 7898447 (2011-03-01), Goshima et al.
patent: 2009/0032738 (2009-02-01), Takekoshi
patent: 2009/0084990 (2009-04-01), Nishimura et al.
patent: 2009/0134343 (2009-05-01), Inoue
patent: 2010/0207017 (2010-08-01), Horiuchi et al.
patent: 2010/0288939 (2010-11-01), Nishimura
patent: 10-027749 (1998-01-01), None
patent: 2004-259812 (2004-09-01), None
patent: 2006-339405 (2006-12-01), None
Office Action issued Feb. 14. 2011, in Korean Patent Application No. 10-2009-37900, (w/English translation), pp. 1-7.
NuFlare Technology, Inc.
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Vanore David A
LandOfFree
Method for inspecting settling time of deflection amplifier,... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for inspecting settling time of deflection amplifier,..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for inspecting settling time of deflection amplifier,... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2698428