Semiconductor device manufacturing method, semiconductor...

Details Semiconductor device manufacturing method, semiconductor... Semiconductor device manufacturing method, semiconductor...

2011-08-30

2011-08-30

Garber, Charles (Department: 2812)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C257SE21585

Reexamination Certificate

active

08008189

ABSTRACT:
A semiconductor device manufacturing method, includes the steps of forming an insulating film over a semiconductor substrate, thinning selectively a thick portion, whose film thickness is thicker than a reference value, of the insulating film, forming contact holes in a thinned portion of the insulating film25, and forming conductive plugs in the contact holes.

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