Sulfonate salts and derivatives, photoacid generators,...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

Reexamination Certificate

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C430S905000, C430S910000, C430S921000, C430S925000, C562S111000, C562S113000

Reexamination Certificate

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07919226

ABSTRACT:
Sulfonate salts have the formula:CF3—CH(OCOR)—CF2SO3−M+wherein R is C1-C20alkyl or C6-C14aryl, and M+is a lithium, sodium, potassium, ammonium or tetramethylammonium ion. Onium salts, oximesulfonates and sulfonyloxyimides and other compounds derived from these sulfonate salts are effective photoacid generators in chemically amplified resist compositions.

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