Thin film transistor array panels for a liquid crystal...

Details Thin film transistor array panels for a liquid crystal... Thin film transistor array panels for a liquid crystal...

2011-07-12

2011-07-12

Chen, Wen-Ying P (Department: 2871)

Liquid crystal cells, elements and systems

Particular structure

Having significant detail of cell structure only

C349S151000, C349S152000, C349S147000

Reexamination Certificate

active

07978292

ABSTRACT:
The invention is directed to simultaneously etching thin films to different uniform depths depending on positions by using a photoresist pattern having different thickness depending on positions as an etch mask in order to form a contact hole for a gate pad along with at least one other layer, or a data wire and a semiconductor pattern, via a single photolithography step.

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