Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate
2011-04-12
2011-04-12
Culbert, Roberts (Department: 1716)
Coating processes
Coating by vapor, gas, or smoke
C427S255280, C427S251000, C427S255500
Reexamination Certificate
active
07923069
ABSTRACT:
A multi-station deposition apparatus capable of simultaneous processing multiple substrates using a plurality of stations, where a gas curtain separates the stations. The apparatus further comprises a multi-station platen that supports a plurality of wafers and rotates the wafers into specific deposition positions at which deposition gases are supplied to the wafers. The deposition gases may be supplied to the wafer through single zone or multi-zone gas dispensing nozzles.
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Chang Mei
Glenn Walter B.
Lei Lawrence C.
Applied Materials Inc.
Culbert Roberts
Patterson & Sheridan LLP
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