Oscillating, deflectable micromechanical element and method...

Oscillators – With distributed parameter resonator

Reexamination Certificate

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Details

C331S1070DP, C257S414000, C257S415000, C257S417000, C385S010000, C385S014000, C250S251000, C250S2140RC

Reexamination Certificate

active

07932788

ABSTRACT:
The invention relates to micromechanical elements deflectable in an oscillating manner and to a method for the operation of such elements. In this respect, it is the object of the invention to be able to operate the micromechanical elements in a stable and simple manner on the oscillating deflection while taking account of the respective mechanical resonant frequency. A least one spring element is present on elements in accordance with the invention with which it is held. It is deflected between two reversal points using an electrical AC voltage. The one or more spring element(s) has/have non-linear spring characteristics so that a changed mechanical resonant frequency results in dependence on the respective deflection.

REFERENCES:
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patent: 6157114 (2000-12-01), Bennig
patent: 6672732 (2004-01-01), Niendorf
patent: 2007/0180907 (2007-08-01), Krieg
patent: 10320725 (2004-11-01), None
patent: 0754958 (1997-01-01), None
patent: 9801948 (1998-01-01), None
patent: 0101187 (2001-01-01), None
patent: 03073597 (2003-09-01), None
International Search Report for Corresponding PCT Application PCT/DE2006/000745, Dec. 27, 2006.
International Preliminary Report on Patentability and Written Opinion for Corresponding PCT Application PCT/DE2006/000745, Dec. 10, 2008.
Envoy S. et al. “Nanofabrication and Electrostatic operation of Single Crystal Silicon paddle Oscillators” Journal of Applied Physic, American Institiute of Physics, New York, US, Dec. 1,1999.

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