Semiconductor integrated circuit device including memory...

Details Semiconductor integrated circuit device including memory... Semiconductor integrated circuit device including memory...

2011-03-15

2011-03-15

Le, Thao X (Department: 2892)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S536000, C257SE27071

Reexamination Certificate

active

07906816

ABSTRACT:
A semiconductor integrated circuit device includes an element isolation region which is formed in a semiconductor substrate to isolate an element region of the semiconductor substrate, memory cells having floating gates and formed on the element region, and resistor elements formed on the element region. The floating gate has a laminated structure containing a plurality of conductive films. The resistor element has a contact portion for connection with a wiring and a resistor portion acting as a resistor. The resistor portion has a laminated structure having at least one of the plurality of conductive films and an insulating material having a selective etching ratio with respect to the semiconductor substrate.

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