Positive photosensitive composition and pattern-forming...

Details Positive photosensitive composition and pattern-forming... Positive photosensitive composition and pattern-forming...

2011-06-14

2011-06-14

Kelly, Cynthia H (Department: 1722)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C430S326000, C430S919000, C430S322000

Reexamination Certificate

active

07960087

ABSTRACT:
A positive photosensitive composition comprising: (A) a resin having at least one repeating unit having a specific lactone structure at a side chain and being capable of decomposing by the action of an acid to increase the solubility in an alkali developer; and (B) a compound capable of generating a specific acid upon irradiation with an actinic ray or a radiation, and a pattern-forming method using the positive photosensitive composition, are provided.

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Office Action issued Aug. 31, 2010, in counterpart Japanese Application No. 2006-066355.

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