Thermoelectric 3D cooling

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With provision for cooling the housing or its contents

Reexamination Certificate

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Details

C257S686000, C257S712000, C257S717000, C257SE23107, C257SE23108, C257S930000, C136S203000

Reexamination Certificate

active

07893529

ABSTRACT:
The invention comprises a 3D chip stack with an intervening thermoelectric coupling (TEC) plate. Through silicon vias in the 3D chip stack transfer electronic signals among the chips in the 3D stack, power the TEC plate, as well as distribute heat in the stack from hotter chips to cooler chips.

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A Novel VLSI Technology to Manufacture High-Density Thermoelectric Cooling Devices, Howard Chen, Louis Hsu, and Xiaojin Wei. ISBN: 978-2-35500-002-7, Therminic 2007 pp. 1-6, Budapest, Hungary, Sep. 17-19, 2007.

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