Semiconductor device having a reliable contact structure

Details Semiconductor device having a reliable contact structure Semiconductor device having a reliable contact structure

1997-03-21

2000-05-16

Chaudhuri, Olik

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257303, 257306, 257773, 257774, H01L 27108, H01L 2976, H01L 2994, H01L 31119

Patent

active

060640847

ABSTRACT:
A fabrication process of a semiconductor device includes a step of forming a conductive overhang structure at a top part of a contact hole in continuation with a thin conductive film covering an exposed bottom surface and an inner surface of said contact hole.

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