Semiconductor memory device and method of checking same for...

Static information storage and retrieval – Read/write circuit – Bad bit

Reexamination Certificate

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C365S201000

Reexamination Certificate

active

06301163

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a semiconductor memory device having spare memory cells for repairing defects in normal memory cells and, more particularly, to checking spare memory cells for defects.
2. Description of the Background Art
FIG. 30
is a plan view of principal portions of a conventional dynamic semiconductor memory device (referred to hereinafter as a DRAM). In
FIG. 30
, the reference numeral
141
designates an area wherein a column of sense amplifiers are arranged (a sense amplifier forming area);
142
designates an area wherein a group of memory elements are arranged (memory cell array);
143
designates a row decoder for activating a word line specified by a row address signal for selecting a cell in the memory cell array
142
; and
144
designates a column decoder for activating a bit line specified by a column address signal for selecting a cell in the memory cell array
142
.
FIG. 31
conceptually illustrates the structure of an area
145
shown in FIG.
30
. In
FIG. 31
, the reference numeral
146
designates memory cells for constituting the memory cell array
142
; the reference character
147
a
designates word lines provided in respective rows of the normal memory cells and controlled by a normal row decoder
143
a
so that they are active/inactive;
147
b
designates a word line provided in a spare cell row in which spare memory cells are arranged and controlled by a spare row decoder
143
b
so that it is active/inactive;
148
a
designates bit lines provided in respective normal columns in which the normal memory cells are arranged and controlled by a normal column decoder
144
a
of the column decoder
144
so that they are active/inactive; and
148
b
designates bit lines provided in respective spare memory cell columns in which the spare memory cells are arranged and controlled by a spare column decoder
144
b
of the column decoder
144
so that they are active/inactive.
The DRAM shown in
FIG. 31
has a redundant construction for repairing a defect. Each memory cell array
142
includes one or more spare rows and one or more spare columns. If a memory cell is defective, the row or column containing the defect is electrically replaced with a spare row or spare column by the laser fuse programming or the like to repair the defect.
FIG. 32
is a plan view of a conventional dynamic semiconductor memory device. In
FIG. 32
, the reference numeral
200
designates a storage area of the dynamic semiconductor memory device;
201
designates an area wherein a column of sense amplifiers are arranged (a sense amplifier forming area);
202
designates an area wherein a group of memory elements formed between the areas
201
wherein a plurality of columns of sense amplifiers are arranged respectively are arranged;
203
designates word line backing areas for connecting metal interconnecting lines having a relatively low resistance; and
204
designates areas wherein interconnecting lines having a relatively high resistance are formed in a layer different from the word line backing areas
203
and intersecting the sense amplifier forming areas
201
.
FIG. 33
conceptually illustrates the structure of the word line backing areas
203
shown in FIG.
32
. In
FIG. 33
, the reference numeral
205
designates aluminum interconnecting lines having a relatively low resistance; and
206
designates polycide interconnecting lines having a relatively high resistance and connected in parallel with the aluminum interconnecting lines
205
.
FIG. 34
is a block diagram of a memory cell block of the dynamic semiconductor memory device. In
FIG. 34
, the reference characters
141
a
and
141
c
designate sense amplifier forming areas wherein sense amplifiers for reading data from the normal memory cells are formed;
141
b
and
141
d
designate sense amplifier forming areas wherein sense amplifiers for reading data from the spare memory cells are formed;
148
c
designates bit line pairs for transmitting data read from the normal memory cells; and
148
d
designates bit line pairs for transmitting data read from the spare memory cells. Like reference numerals and characters are used to designate elements corresponding to those of FIG.
31
.
The conventional semiconductor memory device constructed as above described has failed to effectively repair defects in the memory cells arranged in the spare rows and spare columns.
SUMMARY OF THE INVENTION
A first aspect of the present invention is intended for a semiconductor memory device switchable between a normal mode wherein normal memory cells are read/written and a test mode wherein the normal memory cells and spare memory cells provided for repairing a defect in the normal memory cells are tested for a defect. According to the present invention, the semiconductor memory device comprises: a memory cell array including normal rows and normal columns in which the normal memory cells are arranged, and at least one spare memory cell row and at least one spare memory cell column in which the spare memory cells are arranged; a normal row decoder and a normal column decoder for accessing the normal memory cells; a spare row decoder for selecting the at least one spare memory cell row in the normal modes; and a spare column decoder for selecting the at least one spare memory cell column in the normal mode, wherein an address signal for addressing the memory cell array is used in the test mode to put at least one of the at least one spare memory cell row and the at least one spare memory cell column into a selected state without using the spare row decoder and the spare column decoder.
Preferably, according to a second aspect of the present invention, the semiconductor memory device further comprises access means for accessing a first spare memory cell selected by the normal row decoder and the spare column decoder, a second spare memory cell selected by the normal column decoder and the spare row decoder, and a third spare memory cell selected by the spare row decoder and the spare column decoder in the test mode.
Preferably, according to a third aspect of the present invention, the access means decodes a normal row address signal and a normal column address signal for selecting the normal memory cells in the normal mode to select the first to third spare memory cells in the test mode.
Preferably, according to a fourth aspect of the present invention, the access means includes: a first test row decoder for decoding the normal row address signal to select the normal rows in the test mode; a second test row decoder for decoding the normal row address signal to select the at least one spare memory cell row in the test mode; a first test column decoder for decoding the normal column address signal to select the normal columns in the test mode; a second test column decoder for decoding the normal column address signal to select the at least one spare memory cell column in the test mode; and control means for setting a first condition in which the first test row decoder and the first test column decoder are operated, a second condition in which the first test row decoder and the second column decoder are operated, a third condition in which the second test row decoder and the first test column decoder are operated, and a fourth condition in which the second test row decoder and the second test column decoder are operated.
Preferably, according to a fifth aspect of the present invention, the access means includes: converting means for converting the normal row address signal and the normal column address signal to produce a test row address signal and a test column address signal in the test mode; a test row decoder for decoding the test row address signal to select the normal rows and the at least one spare memory cell row in the test mode; and a test column decoder for decoding the test column address signal to select the normal columns and the at least one spare memory cell column in the test mode.
Preferably, according to a sixth aspect of the present invention, the access mean

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