Positive resist terpolymer composition and method of forming res

Details Positive resist terpolymer composition and method of forming res Positive resist terpolymer composition and method of forming res

1979-07-02

1981-06-30

Brammer, Jack P.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

427 431, 20415914, 430296, 430326, 430942, 526291, 526317, G03C 168

Patent

active

042763657

ABSTRACT:
PCT No. PCT/JP78/00022 Sec. 371 Date July 7, 1979 Sec. 102(e) Date July 2, 1979 PCT Filed Nov. 6, 1978 PCT Pub. No. WO79/00284 PCT Pub. Date May 31, 1979
A cross-linkable positive-working ionizing radiation-resist or ultraviolet ray- resist polymer composition including: in polymerized form,

REFERENCES:
patent: 3981985 (1976-09-01), Roberts
patent: 3984582 (1976-10-01), Feder et al.
patent: 4061832 (1977-12-01), Roberts
patent: 4156745 (1979-05-01), Hatzakis et al.

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