Wafer storing system having vessel coating with ozone-proof mate

Details Wafer storing system having vessel coating with ozone-proof mate Wafer storing system having vessel coating with ozone-proof mate

1997-06-27

1999-08-31

Sewell, Paul T.

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

206711, 206454, B65D 8530

Patent

active

059441933

ABSTRACT:
A gate oxide layer grown on a semiconductor wafer is liable to be contaminated by organic compound particles in a clean room between the growth of the oxide and the next deposition step, and the semiconductor wafer is sealed in ozonic ambience in a vessel coated with an inner wall of ozone-proof material such as chromium oxide so that the ozone decomposes the organic compound particles without producing new particles.

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M. Kimura; Time Dependent Dielectric Breakdown Phenomena Caused by Carbon Organic Contaminants p. 610.

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