Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1984-07-12
1986-06-10
Lacey, David L.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156624, 427 86, C30B 1906
Patent
active
045941262
ABSTRACT:
An apparatus and method for the growth of thin epitaxial layers on crystalline substrates. A portion of the growth surface of a substrate held at temperature T.sub.2 is contacted with a solution with a saturation temperature T.sub.s in a narrow channel while the solution is in streamline flow in the channel. The substrate is mounted on a slider. As the slider is moved across the narrow channel, progressively different portions of the growth surface are exposed to, and withdrawn from exposure to, the flowing solution. The rate of growth of epitaxial material on the growth surface of the substrate is determined by the relationship between T.sub.s, T.sub.2 and the temperature T.sub.1 of the solution as it enters the narrow channel. The thickness of the epitaxial layer on a portion of the growth surface is determined by the rate of growth of epitaxial material and the dwell time during which the portion of the growth surface is exposed to the flowing solution.
REFERENCES:
patent: Re28140 (1974-08-01), Bergh et al.
patent: 3249404 (1966-05-01), Bennett
patent: 3880680 (1975-04-01), Weyrich et al.
patent: 4319953 (1982-03-01), Grabmaier
patent: 4357897 (1982-11-01), Leswin
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