Water pump with integral gate valve

Details Water pump with integral gate valve Water pump with integral gate valve

1997-08-20

1999-05-11

Capossela, Ronald

Refrigeration

Low pressure cold trap process and apparatus

417901, B01D8/00

Patent

active

059015586

ABSTRACT:
A cold trap includes a fluid conduit having a fluid flow path therethrough, a length along the fluid flow path and a width transverse to the fluid flow path. The width of the fluid conduit is greater than the length. A gate valve is formed integrally with the fluid flow conduit for opening and closing the fluid flow path. A cryopumping array having an outer rim surrounding a central opening is positioned within the fluid conduit downstream from the gate valve and transverse to the fluid flow path such that the fluid flow path extends through the central opening. The outer rim captures water vapor from the fluid flow path.

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Mundinger, H.J., et al., "Fast Cryopump Regeneration Does More Than Save Time," Semiconductor International, pp. 154-156 (Jul. 1993).
Power, B. D., et al., "Single Structure Vapour Pumping Groups," Paper presented at the Third Israeli Vacum Congress, Pp. 117-122 (Sep. 1973).
Dennis, N.T.M., et al., "Further Developments with Single Structure Vapour Pumping Groups," Vacuum, vol. 28, No. 12, pp. 551-558.
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Power, B. D., "Abstract: Diffstaks with Integral Cold Traps", Journal of Vacuum Science & Technology, vol. 15, No. 2 (Mar./Apr. 1978).
Photograph from CTI-Cryogenics Manual.
Drawing from CTI-Cryogenics Manual.

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