Thin film transistor for a plate display

Details Thin film transistor for a plate display Thin film transistor for a plate display

1989-12-15

1991-11-26

Hille, Rolf

357 4, 357 71, H01L 2712, H01L 2701, H01L 2348

Patent

active

050686992

ABSTRACT:
There is disclosed a thin film transistor for a plate display comprising first and second gates of different metals stacked one on top of the other on a glass substrate, a first insulating layer of tantalum oxide film formed on top of said second gate, second and third insulating layers of silicon dioxide formed successively on the first insulating layer and a semiconductor layer deposited on said third insulating layer.

REFERENCES:
patent: 4469568 (1984-09-01), Kato et al.

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