Scanning probe microscope having a directional coupler and a Z-d

Details Scanning probe microscope having a directional coupler and a Z-d Scanning probe microscope having a directional coupler and a Z-d

1993-05-07

1994-06-28

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

25022711, H01J 314

Patent

active

053249356

ABSTRACT:
In a probe-scanning type of microscope, a cantilever arm carries a probe, a Z-direction distance adjusting piezoelectric element for adjusting the distance of the cantilever arm in a Z direction and the end portion of a fiber for directing a laser beam onto the back surface of the cantilever arm are secured to a three-dimensional scanner tube for scanning in X,Y and Z directions, whereby displacement of the cantilever arm is measured by observing interference of light.

REFERENCES:
patent: 5168159 (1992-12-01), Yagi
patent: 5237859 (1993-08-01), Elings et al.

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