Particle position correlator and correlation method for a surfac

Details Particle position correlator and correlation method for a surfac Particle position correlator and correlation method for a surfac

1985-10-11

1987-02-10

LaRoche, Eugene R.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

364491, G01N 2100

Patent

active

046419675

ABSTRACT:
A method and apparatus for particle detection and position correlation that fuses separate detections of the same particle on adjacent scan lines into one. A first scan line on a surface is scanned with a laser beam and the scattered light detected. The detection generates address and amplitude data for each particle which is stored. The second line scanned also generates data which is stored in a buffer. Particle data between scan lines is compared. Data for new particles is stored, data for previous particles no longer detected being sent to computer storage, and data for the same particle being compared and only the one with larger amplitude being kept. The results in computer storage may be displayed as a wafer with those pixels lit which have particles.

REFERENCES:
patent: 4559603 (1985-12-01), Yoshikawa
Untitled article by A. Neukermans, dated Jan. 13, 1986.

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