Scanning probe microscope

Details Scanning probe microscope Scanning probe microscope

1996-05-24

1997-10-07

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

25044011, 250306, H01J 3720

Patent

active

056751540

ABSTRACT:
Features for incorporation with scanning probe microscopes are provided which may be used separately or together. The features include constructing the microscope with a hinged top housing providing easy access to the heart of the microscope; a self-aligning and torque limiting magnetic clutch coupling a motor drive powering at least one vertical adjustment screw of the microscope; a removable microscope head for easy adjustment; an optical microscope, optionally mounted to an electronic camera and imaging system, installed adjacent to the head; operation on an inverted microscope stage; bowing error correction; a gas sparging system providing contaminant and noise reduction; a glove box type of loading system so that reactive materials may be safely loaded into the microscope; and a compact desk-top chamber which provides acoustic and vibration isolation.

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