Method of forming contamination guard ring for semiconductor int

Details Method of forming contamination guard ring for semiconductor int Method of forming contamination guard ring for semiconductor int

1994-05-31

1996-10-22

Tsai, H. Jey

Fishing, trapping, and vermin destroying

437922, 437924, H01L 2170, H01L 2700

Patent

active

055676430

ABSTRACT:
The guard ring is a barrier which prevents contaminates from diffusing through a window opening through insulating layers to adjacent semiconductor devices. The guard ring is formed surrounding a window in the insulation layers over a fuse link or an alignment mark. The guard ring is an annular metal ring that penetrates two or more insulating layers and contacts the substrate.

REFERENCES:
patent: 5025300 (1991-06-01), Billig et al.
patent: 5041897 (1991-08-01), Machida et al.
patent: 5235205 (1993-08-01), Lippitt, III

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