Method for fabricating a magneto-optical recording element

Details Method for fabricating a magneto-optical recording element Method for fabricating a magneto-optical recording element

1987-04-24

1989-07-25

Niebling, John F.

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20419215, C23C 1414

Patent

active

048510963

ABSTRACT:
In a magneto-optical recording element comprising a substrate, a magentic layer and a dielectric layer, the dielectric layer is formed by deposition of a composition comprising Si.sub.3 H.sub.4 and a refractive index-improving agent such as Al.sub.2 O.sub.3 or Y.sub.2 O.sub.3. This dielectric layer has a high refractive index and the enhancement effect is improved. Moreover, this dielectric layer is excellent in the adhesion and resistance characteristics.

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patent: 4680742 (1987-07-01), Yamada et al.
patent: 4683044 (1987-07-01), Shimizu et al.

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