Process for removing metal ions from organic photoresist solutio

Details Process for removing metal ions from organic photoresist solutio Process for removing metal ions from organic photoresist solutio

1996-05-15

1997-10-07

Young, Christopher G.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

210681, 210683, 210684, 210685, 210686, 528482, G03F 7004

Patent

active

056746628

ABSTRACT:
The invention is a process of removing metal ion contaminants from an organic solution, especially one having acid labile components. The process comprises modifying a cationic exchange resin by treatment with ammonia or amine and contacting said modified ion exchange resin with an organic solution containing metal ion contaminants. The process is especially useful for treating photoresist compositions.

REFERENCES:
patent: 2628165 (1953-02-01), Bliss et al.
patent: 4002564 (1977-01-01), Carbonel et al.
patent: 5021216 (1991-06-01), Whitney et al.
patent: 5118787 (1992-06-01), Furuno
patent: 5234789 (1993-08-01), Favier, Jr. et al.
patent: 5300628 (1994-04-01), Honda
patent: 5350714 (1994-09-01), Trefonas, Ii et al.
patent: 5378802 (1995-01-01), Honda
patent: 5446125 (1995-08-01), Honda et al.
patent: 5472616 (1995-12-01), Szmanda et al.
patent: 5518628 (1996-05-01), Carey
patent: 5525315 (1996-06-01), Burke

Affiliated with

Also associated with

Rating

Process for removing metal ions from organic photoresist solutio does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for removing metal ions from organic photoresist solutio, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for removing metal ions from organic photoresist solutio will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2355708