Dielectric ceramics for electrostatic chucks and method of makin

Details Dielectric ceramics for electrostatic chucks and method of makin Dielectric ceramics for electrostatic chucks and method of makin

1989-04-26

1992-04-14

Dixon, Jr., William R.

Compositions: ceramic

Ceramic compositions

Refractory

501135, 501153, C04B 3510

Patent

active

051048345

ABSTRACT:
A dielectric ceramic for use in an electrostatic chuck, formed by firing in a reducing atmosphere a ceramic material mainly comprised of alumina, wherein said ceramic material comprises an alkaline earth metal in an amount of from 1.0 to 6.0% by weight in terms of oxide and a transition metal in an amount of from 0.5 to 6.0% by weight in terms of oxide, while controlling the dew point of atmosphere gas to be not more than 45.degree. C.
Also disclosed is a method of making a dielectric ceramic for use in an electrostatic chuck, comprising firing a ceramic material mainly comprised of alumina and containing from 1.0 to 6.0% by weight of an alkaline earth metal in terms of oxide and from 0.5 to 6.0% by weight of a transition metal in terms of oxide, in a reducing atmosphere while controlling the dew point of atmosphere gas.

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patent: 4591574 (1986-05-01), Ando et al.
patent: 4668644 (1987-05-01), Fuhol
patent: 4678683 (1987-07-01), Pasco et al.
patent: 4735926 (1988-04-01), Ando et al.
Chem. Abstract of Japanese Patent 79-32450, dated Oct. 15, 1979.
Japanese Unexamined Patent Application No. 94953, published May 1, 1987.
Chemical Abstracts, vol. 92, No. 6, Feb. 1, 1980, p. 270.
Patent Abstracts of Japan, vol. 11, No. 294, (E-544), [2741], Sep. 22, 1987.

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