Method and apparatus for vapor deposition of material onto a sub

Details Method and apparatus for vapor deposition of material onto a sub Method and apparatus for vapor deposition of material onto a sub

1989-09-08

1992-04-14

Bell, Janyce

Coating processes

Coating by vapor, gas, or smoke

Metal coating

118720, 118726, 118728, 427282, 427287, 437245, C23C 1600

Patent

active

051046954

ABSTRACT:
A method and apparatus for depositing the material onto a substrate is provided. The apparatus includes a mesh member which has impregnated therein the material which is to be vapor deposited. The mesh member with the material thereon is heated to vaporize the material and the vaporized material is then deposited onto the desired substrate. Preferably the material that is deposited is maintained in a crucible having an opening and the mesh member is disposed over the opening. The material in the crucible is vaporized and condensed onto the mesh member, and the condensed material wicks through the mesh member and then revaporizes from the top of the mesh member and is deposited onto the substrates.

REFERENCES:
patent: 2378476 (1945-06-01), Guellich
patent: 2612442 (1952-09-01), Goetzel
patent: 3104178 (1963-09-01), DaSilva
patent: 3330647 (1967-06-01), Hunt et al.
patent: 3446936 (1969-05-01), Hanson et al.
patent: 3517644 (1970-06-01), Baer
patent: 3690638 (1972-09-01), Roblin
patent: 3690933 (1972-09-01), Cole
patent: 3836387 (1974-09-01), Roblin
IBM Technical disclosure Bulletin vol. 6, No. 7, Dec., 1963, p. 77.
IBM Technical disclosure Bulletin vol, 9, No. 5, Oct. 1966, p. 543.
IBM Technical Disclosure Bulletin vol. 9, No. 12, May 1967, p. 1677.
IBM Technical Disclosure Bulletin vol. 6, No. 4, Sep. 1963, p. 1.

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