Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article
Patent
1995-03-27
1996-01-02
Bowers, Jr., Charles L.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making named article
430321, 430328, 430330, 430945, 216 24, G03F 700
Patent
active
054807638
ABSTRACT:
A stamper for use in producing high-density recording disks of the type in which an information signal pattern is formed as successive minute pits in a recording surface, is formed of glass and is manufactured by an image reversal photolithography process in which a film of a positive type of photoresist is scanned by a modulated light beam, baking is then executed to produce cross-linking of molecular chains within the portions of the photoresist which have been exposed to the scanning beam, and the photoresist is then subjected to overall flood exposure to light, whereby the photoresist portions which were not exposed to the scanning light beam can be removed by applying an alkaline solution. A photoresist pattern is thereby formed, to be used as an etching mask which can be patterned to a higher degree of resolution than has been possible hitherto, whereby a glass stamper for producing very high-capacity recording disks can be manufactured.
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Kondo Tetsuya
Murata Kei
Nagai Yoshikazu
Ohshima Katunori
Bowers Jr. Charles L.
McPherson John A.
Victor Company of Japan Ltd.
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