Support stand for a corpuscular-beam microscope

Details Support stand for a corpuscular-beam microscope Support stand for a corpuscular-beam microscope

1976-08-31

1977-08-23

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250306, G01M 2300

Patent

active

040442560

ABSTRACT:
A corpuscular-beam microscope including a support stand, a columnar housing containing the optical elements of the microscope, electronic control and regulating means for generating and transmitting voltage signals to parts of a beam generator of the microscope which are at high-voltage potential, and at least one high-vacuum pump for evacuating the microscope housing. The improvement of the invention comprises the support stand comprising a horizontal base member and a flexure-resistant vertical support member disposed on the base member. The microscope housing, the control and regulating means, and the pump are mounted on different sides of the support member and are arranged so that the center of gravity of the support stand is disposed between the support member and the optical axis of the microscope near the axis.

REFERENCES:
patent: 2370373 (1945-02-01), Ruska et al.
patent: 3772510 (1973-11-01), Mertens et al.

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