Process for inhibiting metal migration during heat cycling of mu

Details Process for inhibiting metal migration during heat cycling of mu Process for inhibiting metal migration during heat cycling of mu

1982-12-02

1986-03-18

Stallard, Wayland

Metal treatment

Process of modifying or maintaining internal physical...

Magnetic materials

228123, 228179, 228220, 428620, 428672, 428674, B23K 3102, C21D 174

Patent

active

045766592

ABSTRACT:
The formation of metal oxide contaminants on the surfaces of thin metal films by out-diffusion primarily through the grain boundaries thereof of metal from an underlayer is inhibited by conducting heat cycling of such layered metal structures in an ambient gas mixture composed of inert gas, such as nitrogen, containing a sufficient amount of active gas, such as, hydrogen, carbon monoxide, or the like, substantially to suppress such out-diffusion.

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IBM Technical Disclosure Bulletin, vol. 21, No. 10, Mar. 1979, p. 4244.
IBM Technical Disclosure Bulletin, vol. 13, No. 10, Mar. 1971, pp. 3003-3004.
The Reduction of Au-Al Intermetallic Formation & Electromigration in Hydrogen Environments by Shih et al., IEEE Transactions . . . , vol. ED-26, No. 1, Jan. 1979.

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