Stereoscopic measuring apparatus

Details Stereoscopic measuring apparatus Stereoscopic measuring apparatus

1976-05-14

1977-08-02

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

250310, 358 92, 358107, G01N 2300, G21K 700, H04N 954, H04N 960

Patent

active

040398293

ABSTRACT:
Apparatus capable of tridimensionally measuring the distance between two arbitrary points on the surface of a sample is disclosed. In apparatus wherein the surface of the sample to be observed is scanned with an energized beam, wherein a secondary radiation emitted from the sample is detected and wherein a sample image is displayed by making the detected signal a video signal, two sample images obtained by changing-over the incident angle of the beam on the sample surface are displayed, whereby the stereoscopic viewing of the sample surface is enabled. In this invention, there is added means for superposing and displaying marks at two positions of both the sample images as correspond to two arbitrary points on the sample surface and for automatically calculating the tridimensional distance between the two points on the sample surface on the basis of positioning signals of the marks.

REFERENCES:
patent: 2786096 (1957-03-01), Palmer
patent: 3585382 (1971-06-01), Suganuma
patent: 3986027 (1976-10-01), Holmes

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