Self-aligned vertical intrinsic resistance

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Patent

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Details

Other Related Categories

257379, 257536, 257537, 257538, 257903, 257904, H01L 2702, H01L 2712, H01L 2701

Type

Patent

Status

active

Patent number

052412067

Description

ABSTRACT:
A self-aligned vertical intrinsic resistance for use in semiconductor devices is developed. The self-aligned vertical intrinsic resistance may be used in a variety of designs, such as functioning as a pullup device in integrated circuits and more specifically for use as a pullup resistor in SRAM devices. The vertical positioning of the intrinsic resistance not only takes up less die space but also allows for a simple process to construct the resistance by eliminating a photomask step that is normally required prior to implanting an intrinsic resistance used in conventional fabrication processes.

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patent: 4849801 (1989-07-01), Honjyo et al.
patent: 4961103 (1990-10-01), Saitoh et al.
patent: 5034797 (1991-07-01), Tamanaka et al.

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