Positive radiation-sensitive mixture, using a monomeric silyleno

Details Positive radiation-sensitive mixture, using a monomeric silyleno Positive radiation-sensitive mixture, using a monomeric silyleno

1988-09-13

1990-04-10

Michl, Paul R.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430270, 430175, 430326, G03C 1495

Patent

active

049160460

ABSTRACT:
The invention relates to a positive radiation-sensitive mixture containing a compound which forms an acid under the action of actinic radiation, an acid-cleavable compound, and a binder, wherein the acid-cleavable compound comprises a monomeric silylenol ether. The radiation-sensitive mixture described has a better shelf life than the prior art products and a high structural resolution.

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