Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1996-12-19

1998-03-24

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 37256, H01J 37244

Patent

active

057315809

ABSTRACT:
A scanning electron microscope in which means for generating crossed electric and magnetic fields is provided on an electron source side of an objective lens, secondary electrons emitted from a specimen are detected through the crossed electric and magnetic fields (E+B), a deflecting electrode or a deflecting coil is provided in a scanning coil part, means for detecting a beam current is provided in the crossed electric and magnetic fields, whereby accurate measurement of the beam current can be realized while maintaining the array of a high resolution optical system without need for performing mechanical or electrical adjustment.

REFERENCES:
patent: 4288692 (1981-09-01), Schamber et al.
patent: 4697080 (1987-09-01), King
patent: 4751393 (1988-06-01), Corey, Jr. et al.

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