Method of making barium strontium titanate (BST) thin film by er

Details Method of making barium strontium titanate (BST) thin film by er Method of making barium strontium titanate (BST) thin film by er

1995-06-07

1998-03-24

Bowers, Jr., Charles L.

Fishing, trapping, and vermin destroying

501139, 3613215, H01L 2170, C04B 3546

Patent

active

057312206

ABSTRACT:
A semiconductor device and process for making the same are disclosed which incorporate a relatively large percentage of erbium dopant (1 to 5%) into a BST dielectric film 24 with small grain size (e.g. 10 nm to 50 nm). Dielectric film 24 is preferably disposed between electrodes 18 and 26 (which preferably have a Pt layer contacting the BST) to form a capacitive structure with a relatively high dielectric constant and relatively low leakage current. Apparently, properties of the thin film deposition and small grain size. including temperatures well below bulk BST sintering temperatures, allow the film to support markedly higher defect concentrations without erbium precipitation than are observed for bulk BST. For erbium doping levels generally between 1% and 3%, over an order of magnitude decrease in leakage current (compared to undoped BST) may be achieved for such films.

REFERENCES:
patent: 4863883 (1989-09-01), Menashi et al.
patent: 5089932 (1992-02-01), Saito et al.
patent: 5219812 (1993-01-01), Doi et al.
patent: 5232880 (1993-08-01), Wada et al.
patent: 5310709 (1994-05-01), Wada et al.
patent: 5314651 (1994-05-01), Kulwicki
patent: 5397753 (1995-03-01), Nishiyama
patent: 5401680 (1995-03-01), Abt et al.
patent: 5453262 (1995-09-01), Dawson et al.
patent: 5453409 (1995-09-01), Kishi et al.
I. K. Yoo, S. B. Sesu, and J. Xing, Mat. Res. Symp. Proc. vol. 310 (1993).
L. A. Xue, Y. Chen, and R. J. Brook, Materials Science and Engineering, B1, 193-201, (1988).
Rainer Waser, J. Am. Ceram. Soc. 74(80, 1934-40 (1991).

Affiliated with

Also associated with

Rating

Method of making barium strontium titanate (BST) thin film by er does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of making barium strontium titanate (BST) thin film by er, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of making barium strontium titanate (BST) thin film by er will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2288300