Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Patent
1997-08-25
1999-07-13
Moses, Richard
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
355 53, 355 75, G03B 2758, G03B 2742, G03B 2762
Patent
active
059234091
ABSTRACT:
In a scanning-type exposure apparatus, a mask and a light-sensitive substrate are disposed substantially vertically in opposed relation to each other, with an optical projection system disposed between the mask and the substrate. Optical projection system includes a plurality of optical elements for projecting an equal-size, erected image of a mask pattern onto the light-sensitive substrate, and these optical elements are arranged in a predetermined direction. A scanning device scanningly moves the mask and the light-sensitive substrate in synchronism with each other relative to the optical projection system in a direction which is perpendicular to both of the predetermined direction and an optical axis of the optical projection system.
REFERENCES:
patent: 3819265 (1974-06-01), Feldman et al.
patent: 4760429 (1988-07-01), O'Connor
patent: 5298939 (1994-03-01), Swanson et al.
patent: 5498118 (1996-03-01), Nakahara
patent: 5530516 (1996-06-01), Sheets
Expanding the Horizons of Optical Projection Lithography, pp. 77-82, Solid State Technology/May 1982.
Hamada Tomohide
Shirasu Hiroshi
Moses Richard
Nikon Corporation
Virmani Shival
LandOfFree
Scanning-type exposure apparatus including a vertically disposed does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Scanning-type exposure apparatus including a vertically disposed, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning-type exposure apparatus including a vertically disposed will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2281223