Method for the pictorial display of a diffraction image in a tra

Details Method for the pictorial display of a diffraction image in a tra Method for the pictorial display of a diffraction image in a tra

Filed on

1977-11-01

Date issued

1979-07-03

Examiner

Dixon, Harold A.

Patent Class

Radiant energy

SubClass

Inspection of solids or liquids by charged particles

SubSubClass

Electron microscope type

Other Related Categories

250396R, G01N 2300

Type

Patent

Status

active

Patent number

041601629

Description

ABSTRACT:
An improved method for pictorially displaying a diffraction image in a transmission-type, scanning, corpuscular-beam microscope in which a beam detector is scanned by a diffraction image moved by a deflection system in line-raster fashion in a first, predetermined direction over the beam detector. The beam detector generates an output signal for controlling the brightness of a television monitor which displays the diffraction image. The improvement of the invention comprises the step of additionally exciting the deflection system so as to move the diffraction image in another, second direction over the beam detector which is perpendicular to the first, predetermined direction so that a predetermined area of the diffraction image which includes at least part of the cross-section of the maximum intensity of the null reflex of the beam is excluded during scanning of the beam detector and the diffraction image displayed by the television monitor is blanked in an area corresponding to the cross-section of the diffraction image which is excluded during scanning.

REFERENCES:
patent: 2354263 (1944-07-01), Hillier
patent: 3225192 (1965-12-01), Katagiri et al.
patent: 3849647 (1974-11-01), Koike et al.
patent: 4068123 (1978-01-01), Kokubo

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