Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Patent
1997-08-15
1999-07-13
King, Roy V.
Coating processes
Direct application of electrical, magnetic, wave, or...
Plasma
427237, 427238, 427239, 427249, 427122, B05D 306, B05D 722, C23C 1626
Patent
active
059224185
ABSTRACT:
An auxiliary electrode which is to be connected to a ground potential or applied with a positive DC voltage is disposed in a center bore which forms an inner surface of a guide bush, and a ringlike dummy member made of a conductive material having an internal diameter equal to or larger than the diameter of the center bore of the guide bush with its both ends having a different diameter is placed on an end face of the guide bush opening the inner surface thereof so that one end having the smaller diameter contacts the end face of the guide bush with its center in alignment with the central axis of the center bore. A DLC film is formed over an inner surface of a guide bush which is in sliding contact with a workpiece held in the guide bush by disposing the guide bush in a vacuum vessel after evacuating the vessel and introducing a gas containing carbon, producing a plasma in a vacuum vessel by applying a DC voltage or a radio frequency power to the guide bush by the plasma CVD process.
REFERENCES:
patent: 4746538 (1988-05-01), Mackowski
patent: 5521351 (1996-05-01), Mahoney
Koike Ryota
Miya Yukio
Sekine Toshiichi
Sugiyama Osamu
Toida Takashi
Citizen Watch Co. Ltd.
King Roy V.
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