Coating apparatus

Details Coating apparatus Coating apparatus

1995-09-25

1997-09-30

Czaja, Donald E.

Coating apparatus

With means to centrifuge work

118319, 118320, B05C 1102, B05B 1302

Patent

active

056722052

ABSTRACT:
According to the present invention, there is provided an coating apparatus including means for holding an object to be process, the object holding means rotating in a state in which the object is placed thereon, a ring-like cup situated on an outer side of the object holding means, processing solution supply means, provided above the object, for supplying a processing solution on a surface of the object, discharge means, provided underneath the ring-like cup, for discharging processing solution portions scattered around when the processing solution is supplied on the surface of the object as a waste solution, together with a gas, and storage means, connected to the discharge means, for storing the waste solution and the gas discharged from the discharge means, wherein the waste solution and the gas are separated from each other in the storage means.

REFERENCES:
patent: 4564280 (1986-01-01), Fukuda
patent: 4788043 (1988-11-01), Kagiyama et al.
patent: 5211753 (1993-05-01), Swain

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