Thin films of ABO.sub.3 with excess A-site and B-site modifiers

Details Thin films of ABO.sub.3 with excess A-site and B-site modifiers Thin films of ABO.sub.3 with excess A-site and B-site modifiers

Filed on

1994-07-05

Date issued

1998-03-03

Examiner

Utech, Benjamin

Patent Class

Fishing, trapping, and vermin destroying

Other Related Categories

437235, 4273762, 427377, 427380, H01L 2144

Type

Patent

Status

active

Patent number

057233616

Description

ABSTRACT:
A method for fabricating an integrate circuit capacitor having a dielectric layer comprising BST with excess A-site and B-site materials such as barium and titanium added. An organometallic or metallic soap precursor solution is prepared comprising a stock solution of BST of greater than 99.999% purity blended with excess A-site and B-site materials such as barium and titanium such that the barium is in the range of 0.01-100 mol %, and such that the titanium is in the range of 0.01-100 mol %. A xylene exchange is then performed to adjust the viscosity of the solution for spin-on application to a substrate. The precursor solution is spun on a first electrode, dried at 400.degree. C. for 2 to 10 minutes, then annealed at 650.degree. C. to 800.degree. C. for about an hour to form a layer of BST with excess titanium. A second electrode is deposited, patterned, and annealed at between 650.degree. C. to 800.degree. C. for about 30 minutes. The resultant capacitor exhibits an enlarged dielectric constant with little change in leakage current.

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