X-ray exposure apparatus with synchrotron radiation intensity me

Details X-ray exposure apparatus with synchrotron radiation intensity me X-ray exposure apparatus with synchrotron radiation intensity me

1998-04-09

2000-12-12

Porta, David P.

X-ray or gamma ray systems or devices

Specific application

Lithography

378207, G21K 500

Patent

active

061608653

ABSTRACT:
A synchrotron radiation measuring system includes an X-ray detector movable in a direction of intensity distribution of synchrotron radiation to follow shift of the synchrotron radiation, and a computing device for reserving therein one of (i) a relation between a signal of the X-ray detector and the intensity of synchrotron radiation and (ii) a relation among a signal of the X-ray detector, the level of vacuum at a synchrotron ring and the intensity of synchrotron radiation, wherein the intensity of synchrotron radiation is measured through the computing device on the basis of an output signal of the X-ray detector.

REFERENCES:
patent: 5159621 (1992-10-01), Watanabe et al.
patent: 5195113 (1993-03-01), Kuwabara
patent: 5285488 (1994-02-01), Watanabe et al.
patent: 5448612 (1995-09-01), Kasumi et al.

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