Method of producing a .lambda./4-shifted diffraction grating

Details Method of producing a .lambda./4-shifted diffraction grating Method of producing a .lambda./4-shifted diffraction grating

1992-07-06

1993-08-17

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

430330, 430394, G03C 516

Patent

active

052368114

ABSTRACT:
A method of producing a .lambda./4 shifted diffraction grating, includes applying an image reversible resist on a substrate on which a diffraction grating is to be formed, exposing a predetermined with light of a first predetermined region of the resist with light of a first predetermined energy, exposing all of the resist with light interference fringes of a second predetermined energy, baking, and thereafter developing the image reversible resist.

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patent: 4885231 (1989-12-01), Chan
Sze "Semiconductor Devices--Physics & Technology" pp. 428-458.

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