Integrated pull tester with an ultrasonic wire bonder

Details Integrated pull tester with an ultrasonic wire bonder Integrated pull tester with an ultrasonic wire bonder

1996-11-27

1999-04-20

Heinrich, Samuel M.

Metal fusion bonding

Process

With measuring, testing, indicating, inspecting, or...

2281805, 73827, H01L 2160

Patent

active

058949810

ABSTRACT:
An ultrasonic wire bonder including apparatus for testing a bond includes a bonding tool ultrasonically driven for welding a wire on an underlying substrate and a clamp for holding the wire to be bonded by the bonding tool. The same clamp or other pulling apparatus moves the wire that has been bonded with a pre-established force to determine whether the bond will withstand the force. The accompanying method for testing a bond includes holding the wire after the bond has been made with the same holder and pulling the wire with a pre-established force substantially along the direction of the wire's longitudinal axis to determine the strength of the bond.

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