Scanning electron microscope and its analogous device

Details Scanning electron microscope and its analogous device Scanning electron microscope and its analogous device

1997-05-30

1999-04-13

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

H01J 37244

Patent

active

058941240

ABSTRACT:
The device of the present invention enables high resolution observation even when a sample is tilted. A deflecting electrode device for generating an electric field having a component in the direction perpendicular to the center axis (optical axis) of an objective lens is provided between the objective lens and the sample. A voltage applied to the deflecting electrode device is controlled in accordance with the tilting of a sample stage. A lateral electric field component generated on the optical axis when the sample stage is tilted is corrected by a deflected electric field generated by the deflecting electrode device. This is effective to suppress generation of astigmatism, and to allows effective arrival of an secondary electron at a secondary electron detector disposed at a position nearer the electron source side than the objective lens.

REFERENCES:
patent: 4658136 (1987-04-01), Ohtaka et al.
patent: 4922097 (1990-05-01), Todokoro et al.
patent: 5387743 (1995-02-01), Sato et al.
patent: 5608218 (1997-03-01), Sato et al.
patent: 5677530 (1997-10-01), Sato et al.

Affiliated with

Also associated with

Rating

Scanning electron microscope and its analogous device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning electron microscope and its analogous device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning electron microscope and its analogous device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-224153