Micro mechanical device with memory metal component

Details Micro mechanical device with memory metal component Micro mechanical device with memory metal component

1997-11-20

2000-06-06

Epps, Georgia

Optical: systems and elements

Optical modulator

359224, G02B 2600

Patent

active

060726172

ABSTRACT:
A method of preventing permanent deformation of deflecting metal components of micro mechanical devices, such as hinges (12) of mirror elements (10) of a digital micro mirror device. The hinges (12) are made from a memory metal capable of undergoing austenite/martensite phase transitions. If the device is operated and the hinges (12) become mechanically distorted, the hinges (12) can be heated to cause a transition to the austenite phase and a return to their original shape.

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"Crystallographic Analysis of TiNi Shape Memory Alloy Thin Film for Micro Actuator", K. Ikuta, H. Fujita, M. Ikuta, H. Fujita, M. Ikeda, and S. Yamashita, Proccedings of the IEEE, p. 38 (Apr. 1990).
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"Smart Thin Film TiNi/Piezoelectric Heterostructures", P.G. Mercado and A.P. Jardine, Dept. of Materials and Science Engineering (No Date Available).

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