Ion source having a mass separation device

Details Ion source having a mass separation device Ion source having a mass separation device

1992-02-21

1993-02-23

Berman, Jack I.

Radiant energy

Ionic separation or analysis

Static field-type ion path-bending selecting means

250423R, 31511181, 31511141, 31511131, H01J 4932, H01J 3708

Patent

active

051893037

ABSTRACT:
An ion source for producing wide, large area type ion beams with a mass-separation device. Four, five six or so electrode plates with ion holes at the same positions are installed at the outlet of the ion source. Second or third one of the electrodes has Wien filters at the ion holes. The Wien filter has permanent magnets and electrodes for producing a magnetic field and an electric field perpendicular to the axial direction of the ion holes. Ion beams which have not been accelerated so fast are separated by mass by the Wien filter. Low kinetic energy of ions alleviates the strength of the magnetic field and the electric field. Wide, large area type ion beams without impurities are obtained.

REFERENCES:
patent: 4486665 (1984-12-01), Leung et al.
patent: 5030885 (1991-07-01), Holmes
E. Leal-Quiros, et al. "Focused high-intensity proton beam from a lithium source by using an E X B stigmatic selector" Rev. Sci. Instrum. 61 (1) pp. 636-638 (1990).

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