Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent
1996-11-20
1998-06-09
Lesmes, George F.
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
430396, G03F 900
Patent
active
057631212
ABSTRACT:
A stencil mask (10) has a membrane (14) under tensile stress and at least one pattern opening (22) formed through the membrane (14). A plurality of stress relief openings (30) are formed in the membrane for reducing stress-induced distortion of the membrane and the mask pattern. The stress relief openings (30) are positioned to relieve concentrations of stress within the membrane (14) such as those resulting from non-regularities within the pattern. In one embodiment, a screening material (56), less rigid than the membrane (14), is contained within the stress relief openings (30).
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Donaldson Richard L.
Harris James E.
Kesterson James C.
Lesmes George F.
Texas Instruments Incorporated
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