Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1992-01-06
1993-09-28
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156657, 156662, 437238, H01L 21306, B44C 122, C03C 1500, C03C 2506
Patent
active
052483797
ABSTRACT:
A process for making a micromechanical generally bowl shaped or round shaped element upon a substrate by providing a member having a generally planar surface and walls extending from the surface Bumpers are then grown into the walls. The generally round shaped oxide bumpers form a generally bowl shaped convexo-concave relationship with the walls. The walls are covered on their outer periphery with a material which is resistant to the growth of the bumpers to control the growth of the bumpers at the periphery of the walls as the bumper is grown into the walls. The final step is removing either the bumpers from the walls or removing the walls from the bumpers leaving either a generally bowl shaped element or a round shaped element respectively on the substrate. In addition the walls may be implanted with a dopant to further control the shape of the bumper. When the generally bowl shaped element is made from silicon, it can be utilized as an optical mirror. When the generally round shaped element is made from silicon dioxide it can be utilized as a lens.
REFERENCES:
patent: 5149397 (1992-09-01), Bol
McBain Nola Mae
Powell William A.
Xerox Corporation
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