Optics: measuring and testing – For optical fiber or waveguide inspection
Patent
1993-07-30
1994-12-06
Rosenberger, Richard A.
Optics: measuring and testing
For optical fiber or waveguide inspection
356378, 356382, G01B 1106, G01B 1122
Patent
active
053715829
ABSTRACT:
A thickness/depth measuring apparatus and method for measuring the thickness of a film forming a lattice-shaped mask and the depth of a groove formed on a workpiece during processing of the workpiece. The thickness/depth measuring apparatus and method provide for irradiating the workpiece with a coherent light beam, controlling the direction for linear polarization of the coherent light beam irradiated onto the workpiece, adjusting the incident angle of the coherent light beam irradiated onto the workpiece in a predetermined angular range, receiving and detecting reflected light reflected by the workpiece at different irradiated incident angles and including higher-order diffracted light; and calculating the thickness of the film and the depth of the groove in accordance with the intensity of the diffracted light detected.
REFERENCES:
patent: 4087121 (1992-02-01), Kakuchi et al.
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patent: 4615620 (1986-10-01), Noguchi et al.
patent: 4927485 (1990-05-01), Cheng et al.
patent: 5209813 (1993-11-01), Oshida et al.
Fujisawa Masayasu
Hashimoto Isao
Hira Yasuo
Ohkawa Atsuko
Toba Tamaki
Hitachi , Ltd.
Rosenberger Richard A.
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