Projection exposure apparatus

Details Projection exposure apparatus Projection exposure apparatus

1986-11-07

1988-04-19

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 43, 355 70, G03B 2742

Patent

active

047393734

ABSTRACT:
A projection exposure apparatus of the type which employs an alignment light of the same wavelength as an exposure light and includes an optical system subjected to correction of chromatic aberration for the exposure light so as to simultaneously observe an alignment area on a reticle and an alignment area on a photosensitive substrate to bring the reticle and the photosensitive substrate into alignment. The apparatus includes light source means for emitting light of a wavelength different from that of the exposure light and capable of sensitizing the photosensitive substrate, and optical means for introducing the light source means into the optical system to project it on to the alignment area on the photosensitive substrate through the alignment area on the reticle.

REFERENCES:
patent: 3718396 (1973-02-01), Hennings
patent: 4437758 (1984-03-01), Suzuki

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