Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent
1995-01-30
1996-02-06
Hille, Rolf
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
257351, 257369, 257393, 257903, H01L 2976
Patent
active
054897904
ABSTRACT:
An SRAM cell includes a pair of cross-coupled inverters where each inverter includes vertical n-channel and p-channel transistors having a gate electrode that is shared between the transistors that make up each inverter. The gate electrodes for the inverters laterally surround the channel regions of the p-channel load transistors to achieve a relatively high beta ratio without occupying a large amount of substrate surface area. Also, the gate electrodes increase the amount of capacitance of the storage nodes and decreases the soft error rate. The active regions of the latch transistors are electrically isolated from the substrate by a buried oxide layer, thereby decreasing the chances of latch-up.
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patent: 4987090 (1991-01-01), Hsu et al.
patent: 5082795 (1992-01-01), Temple
patent: 5256588 (1993-10-01), Witek et al.
patent: 5285093 (1994-02-01), Lage et al.
patent: 5364810 (1994-11-01), Kosa et al.
Wolf; Silicon Processing For The VLSI Era; vol. 2; pp. 72-75 (1990).
Eklund, et al.; "A 0.5 .mu.m BiCMOS Technology for Logic and 4Mbit-class SRAM's;" IEDM; pp. 425-428 (1989).
Hille Rolf
Meyer George R.
Motorola Inc.
Tran Minhloan
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