Radiant energy – Inspection of solids or liquids by charged particles
Patent
1992-11-12
1994-08-09
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
H01J 3700
Patent
active
053368878
ABSTRACT:
A sample is mounted on a piezoelectric actuator and a cantilever provided with a probe is located thereabove. A bias voltage applying circuit supplies the sample with a potential difference V.sub.T and sends out a current signal I.sub.T representing the electric current flowing between the sample and the probe to a current detecting circuit. The current signal is converted into logI.sub.T in a logarithmic amplifier and given to a differential amplifier. A displacement detecting circuit is arranged above the cantilever for detecting the displacement of the free end of the cantilever due to the atomic force appearing between the sample and the probe and for sending a displacement signal Z.sub.TIP representing the displacement to another differential amplifier. The signals from the differential amplifiers are respectively fed to terminals of an analog switch. The analog switch selects a signal to be fed to a control circuit, which control circuit generates and transmits a signal V.sub.Z as a function of the signal it receives, thereby controlling the actuator.
REFERENCES:
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patent: 4823004 (1989-04-01), Kaiser et al.
patent: 5036196 (1991-07-01), Hosaka et al.
patent: 5144128 (1992-09-01), Hasegawa et al.
patent: 5168159 (1992-12-01), Yagi
"Scanning Tunnelling and Atomic Force Microscopy Performed With the Same Probe In One Unit"; by P. J. Bryant et al; vol. 152, Pt. 3, Dec. 1988, pp. 871-875.
Miyamoto Hirofumi
Yagi Akira
Anderson Bruce C.
Olympus Optical Co,. Ltd.
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